GORE? Ultraclean Static Round Cables & Assemblies: Cleanliness Grade 1
These Cleanliness Grade 1 cables are developed and validated to meet the most rigorous EUV requirements for reliability, purity and signal integrity.
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Industry Overview
The Lithography Industry: Development and Challenges
The growing demand for semiconductors — driven by 5G, the Cloud and AI — will only intensify as ever-more devices and technologies are integrated into homes, workplaces and transportation systems. To meet this accelerating demand, fabs using EUV and DUV lithography must increase their speeds and output — without sacrificing purity or precision in the process.
The properties and performance characteristics of GORE? Ultraclean Static Round Cables & Assemblies align with the industry's dual goals: greater precision and cleanliness to support more extreme miniaturization, and greater reliability to support demands for higher yield, quality and speed.
? Learn more about the heightened challenges facing the industry. |
Product Benefits
GORE? Ultraclean Static Round Cables & Assemblies: Unmatched Cleanliness
Designed for static applications, our Cleanliness Grade 1 cables and assemblies meet the most extreme requirements for high-vacuum environments. Gore’s IP-protected cleaning processes enable us to produce high-purity cables and assemblies that are approved for use in the innermost parts of the most advanced EUV systems. Along with unmatched cleanliness, these custom-engineered static round cables provide unmatched performance, because our materials expertise enables us to:
- Achieve higher data rates, with greater signal integrity over longer distances, and precise, reliable terminations.
- Incorporate low-contamination, low-outgassing fluoropolymers such as ePTFE (expanded polytetrafluoroethylene) material, and we can further trim outgassing levels to customer requirements.
Technical Specifications
Property | Vacuum (acc. to Cleanliness Grade 1) |
---|---|
Jacket material | PTFE & fluoropolymer |
Jacket color | white and opaque |
Core types | signal, power |
Minimum bend radius | >10 x OD |
Temperature range [°C] | -20 to +260 a) |
Outgassing rate [mBar x l/sec x cm2] | |
H20 (AMU 18) b) | 6.00E-10 |
CxHyv (volatile CxHy) (AMU 45-100) b) |
2.00E-12 |
CxHynv (non-volatile CxHy) (AMU 101-200) b) |
5.00E-13 |
Hydrogen-induced outgassing (HIO) | applicable |
Forbidden materials | applicable |
Particle-free | applicable |
Certifications | UL |
a) depending on application requirements
b) AMU = Atomic Mass Units
Lithography Applications
At the heart of the most advanced EUV systems, where the demand for purity and precision is greatest, you’ll find GORE? Ultraclean Static Round Cables for Projection Optics Box (POB) and Illuminator.
The Gore Advantage
When it comes to Lithography, you need more than just cable and assembly “products” — you need leading-edge, integrated cable and assembly solutions that are backed by a resourceful, capable and proven partner.
Why Choose Gore and Gore Cable Solutions for Lithography?
Working with Gore, and specifying reliable Gore cables and assemblies for both your static and high-flex applications, can help you achieve more EUV machine uptime, even at higher wafer/hour speeds over multi-million production cycles. We’re not here just to provide ultra-high vacuum cables — we’re ready to help you meet ultra-high expectations as well.
Built-In Cleanliness and Reliability | A Partner Dedicated to Quality |
---|---|
Lowest contamination from CxHy and H20 | Years of experience |
Low friction materials for lowest particulation | Co-engineering and material expertise |
Reliable signal integrity for high-speed data transmission over longer distances | Unmatched cleanliness throughout the entire process |
Tight routing for easy installation in tight spaces | Extensive lab testing that ensures the highest quality |
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Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.
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